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Effects of Al2O3 on Thermal Stability and Electrical Reliability of HfO2 Film on Strained SiGe

✍ Scribed by Xu Dapeng; Wan Li; Cheng Xinhong; He Dawei; Song Zhaorui; Yu Yuehui; Shen Dashen

Book ID: 119639428
Publisher: Elsevier
Year: 2011
Weight: 501 KB
Volume: 40
Category: Article
ISSN: 1875-5372
DOI: 10.1016/s1875-5372(11)60054-4

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