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Structure and thermal stability of (Zr0.6Al0.4)O1.8 thin film on strained SiGe layer

✍ Scribed by Zengfeng Di; Miao Zhang; Weili Liu; Suhua Luo; Zhenghua An; Zhengxuan Zhang; Chenglu Lin


Book ID
116668344
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
385 KB
Volume
351
Category
Article
ISSN
0022-3093

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