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Deposition cycle of atomic layer deposition HfO2 film: Effects on electrical performance and reliability

✍ Scribed by Cheng, Yi-Lung; Hsieh, Cheng-Yang; Chang, You-Ling

Book ID: 122568119
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 657 KB
Volume: 528
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2012.09.089

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