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Effects of crystallization on the electrical properties of ultrathin HfO[sub 2] dielectrics grown by atomic layer deposition

✍ Scribed by Kim, Hyoungsub; McIntyre, Paul C.; Saraswat, Krishna C.

Book ID: 121710335
Publisher: American Institute of Physics
Year: 2003
Tongue: English
Weight: 349 KB
Volume: 82
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1533117

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