Physical and electrical characterization of Ce-HfO2 thin films deposited by thermal atomic layer deposition

✍ Scribed by King, Peter J.; Sedghi, Naser; Hall, Steve; Mitrovic, Ivona Z.; Chalker, Paul R.; Werner, Matthew; Hindley, Sarah

• Book ID: 121827307
• Publisher: AVS (American Vacuum Society)
• Year: 2014
• Tongue: English
• Weight: 950 KB
• Volume: 32
• Category: Article
• ISSN: 1520-8567
• DOI: 10.1116/1.4826174