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Effective work function of Pt, Pd, and Re on atomic layer deposited HfO[sub 2]

✍ Scribed by Gu, Diefeng; Dey, Sandwip K.; Majhi, Prashant

Book ID: 121763774
Publisher: American Institute of Physics
Year: 2006
Tongue: English
Weight: 325 KB
Volume: 89
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.2336718

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