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Thermal effects on 1H and 2H distributions determined by SIMS in atomic layer deposition of HfO2 and Al2O3 using heavy water

โœ Scribed by P. Holliger; C. Hobbs; D. Jalabert; F. Martin; F. Pierre; G. Reimbold; P. Rivallin


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
192 KB
Volume
252
Category
Article
ISSN
0169-4332

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