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Effect of the Surface Condition on the Internal Stress of a-Si: H, a-SiNX: H, and a-Si: H/a-SiNX: H Heterojunction Films

โœ Scribed by Wang, Wanlu ;Liao, Kejun

Publisher
John Wiley and Sons
Year
1990
Tongue
English
Weight
174 KB
Volume
119
Category
Article
ISSN
0031-8965

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