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Studies of some properties of mechanical stress in a-Si:H, a-SiNx:H and a-Si:H/a-SiNx:H heterojunction films

✍ Scribed by Wang Wanlu; Liao Kejun

Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 293 KB
Volume: 165
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(88)90688-8

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