Elastic properties of semiconductor a-Si:H/a-SiNx:H quasiperiodic and periodic superlattices

✍ Scribed by Hua Xia; D. Walton; K.J. Chen; X.K. Zhang

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 195 KB
• Volume: 17
• Category: Article
• ISSN: 0749-6036
• DOI: 10.1006/spmi.1995.1001

✦ Synopsis

Surface Rayleigh acoustic waves and related elastic properties of quasiperiodic and periodic modulated a- (\mathrm{Si}: \mathrm{H} / \mathrm{a}-\mathrm{SiN}_{x}: \mathrm{H}) superlattices have been studied by means of a light-scattering technique. Changes in the phase velocity of the surface Rayleigh acoustic waves as a function of sublayer ( (\mathrm{a}-\mathrm{Si}: \mathrm{H}) ) thickness are interpreted using an effective medium model. Despite the existence of structural mismatch in the bondlength and coordination number and of structural disorder in the bond-angle for (\mathrm{Si}-\mathrm{N}) and (\mathrm{Si}-\mathrm{Si}), no appreciable discrepancy between the measured results and the theoretical predictions has been found.