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Experimental Studies of Light-Induced Stress in a-Si:H/a-SiNX: H Multilayer Films

✍ Scribed by Wang, Wanlu

Publisher: John Wiley and Sons
Year: 1990
Tongue: English
Weight: 229 KB
Volume: 121
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2211210249

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