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Persistent photoconductivity in a-Si:H/a-SiNx:H multilayer films at low temperature

โœ Scribed by Wang, Wanlu ;Liao, Kejun


Publisher
John Wiley and Sons
Year
1989
Tongue
English
Weight
169 KB
Volume
113
Category
Article
ISSN
0031-8965

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\(\mu \mathrm{c}-\mathrm{Si}: \mathrm{H} / \mathrm{a}-\mathrm{Si}: \mathrm{H}\) multilayers have been fabricated with an rf glow-discharge method in which two coupling types of \(\mathrm{if}\) electrodes were used independently by turns without altering the composition of the reactive gases. This sp