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Effect of silicon implantation and annealing on oxygen in Y3A15012

✍ Scribed by I. Sakaguchi; S. Hishita; H. Haneda; T. Yanagitani

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 268 KB
Volume: 33
Category: Article
ISSN: 0921-5107
DOI: 10.1016/0921-5107(94)01207-5

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