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Effect of Ion Implantation and Annealing on the Dielectric Properties of Silicon

✍ Scribed by Żukowski, P. ;Partyka, J. ;Węgierek, P.

Publisher: John Wiley and Sons
Year: 1997
Tongue: English
Weight: 231 KB
Volume: 159
Category: Article
ISSN: 0031-8965
DOI: 10.1002/1521-396x(199702)159:2<509::aid-pssa509>3.0.co;2-k

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