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Effect of rapid thermal annealing of sputtered aluminium nitride film in an oxygen ambient

✍ Scribed by Kyungsoo Jang; Kwangsoo Lee; Junsik Kim; Sunghyun Hwang; Jeongin Lee; Suresh Kumar Dhungel; Sungwook Jung; Junsin Yi

No coin nor oath required. For personal study only.

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