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SIMS study of rapid thermal nitridation of silicon dioxide thick films in ammonia ambient

✍ Scribed by E. Bréelle; S. Rigo; J.A. Kilner; J.-J. Ganem

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

SIMS study of rapid nitridation of silic

✍ E. Bréelle; S. Rigo; J.A. Kilner; J.-J. Ganem 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 342 KB

Effect of rapid thermal annealing of spu

✍ Kyungsoo Jang; Kwangsoo Lee; Junsik Kim; Sunghyun Hwang; Jeongin Lee; Suresh Kum 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 488 KB

Study of atomic transport mechanisms dur

✍ C. Maillot; H. Roulet; G. Dufour; F. Rochet; S. Rigo 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 479 KB

Study of SiO2/Si interface states in MOS

✍ A. Ermolieff; S. Deleonibus; S. Marthon; B. Blanchard; J. Piaguet 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 610 KB