✦ LIBER ✦
Study of atomic transport mechanisms during thermal nitridation of silicon in ammonia using 15N and D labelled gas
✍ Scribed by C. Maillot; H. Roulet; G. Dufour; F. Rochet; S. Rigo
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 479 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0169-4332
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