SIMS study of rapid nitridation of silicon dioxide thick films in an ammonia ambient

✍ Scribed by E. Bréelle; S. Rigo; J.A. Kilner; J.-J. Ganem

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 342 KB
• Volume: 25
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/0026-2692(94)90034-5