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Diffusion Reaction of Oxygen in HfO 2 /SiO 2 /Si Stacks

✍ Scribed by Ferrari, S.; Fanciulli, M.

Book ID: 127294851
Publisher: American Chemical Society
Year: 2006
Tongue: English
Weight: 192 KB
Volume: 110
Category: Article
ISSN: 0022-3654
DOI: 10.1021/jp061788w

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