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Low energy electron-excited nanoscale luminescence spectroscopy studies of intrinsic defects in HfO[sub 2] and SiO[sub 2]–HfO[sub 2]–SiO[sub 2]–Si stacks

✍ Scribed by Strzhemechny, Y. M. ;Bataiev, M. ;Tumakha, S. P. ;Goss, S. H. ;Hinkle, C. L. ;Fulton, C. C. ;Lucovsky, G. ;Brillson, L. J.

Book ID: 121838440
Publisher: AVS (American Vacuum Society)
Year: 2008
Tongue: English
Weight: 557 KB
Volume: 26
Category: Article
ISSN: 0734-211X
DOI: 10.1116/1.2830692

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