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Dielectric Properties of Zirconium Oxide Grown by Atomic Layer Deposition from Iodide Precursor

✍ Scribed by Kukli, Kaupo; Forsgren, Katarina; Ritala, Mikko; Leskelä, Markku; Aarik, Jaan; Hårsta, Anders

No coin nor oath required. For personal study only.

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