✦ LIBER ✦

Comparison of hafnium oxide films grown by atomic layer deposition from iodide and chloride precursors

✍ Scribed by Kaupo Kukli; Mikko Ritala; Timo Sajavaara; Juhani Keinonen; Markku Leskelä

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

ChemInform Abstract: Atomic Layer Deposi

✍ Kaupo Kukli; Jaan Aarik; Aleks Aidla; Katarina Forsgren; Jonas Sundqvist; Anders 📂 Article 📅 2001 🏛 John Wiley and Sons ⚖ 31 KB 👁 2 views

Atomic layer deposition of rare earth ox

✍ Jani Päiväsaari; Matti Putkonen; Timo Sajavaara; Lauri Niinistö 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 153 KB

High Growth Rate of Erbium Oxide Thin Fi

✍ J. Päiväsaari; J. Niinistö; K. Arstila; K. Kukli; M. Putkonen; L. Niinistö 📂 Article 📅 2005 🏛 John Wiley and Sons 🌐 English ⚖ 327 KB 👁 1 views

Structural, electrical, and optical prop

✍ Shan, F. K.; Liu, G. X.; Lee, W. J.; Lee, G. H.; Kim, I. S.; Shin, B. C. 📂 Article 📅 2005 🏛 American Institute of Physics 🌐 English ⚖ 800 KB

The influence of growth temperature and

✍ T. Krajewski; E. Guziewicz; M. Godlewski; L. Wachnicki; I.A. Kowalik; A. Wojcik- 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 382 KB

Influence of thickness and growth temper

✍ Kaupo Kukli; Mikko Ritala; Teet Uustare; Jaan Aarik; Katarina Forsgren; Timo Saj 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 134 KB