✦ LIBER ✦
High Growth Rate of Erbium Oxide Thin Films in Atomic Layer Deposition from (CpMe)3Er and Water Precursors
✍ Scribed by J. Päiväsaari; J. Niinistö; K. Arstila; K. Kukli; M. Putkonen; L. Niinistö
- Publisher
- John Wiley and Sons
- Year
- 2005
- Tongue
- English
- Weight
- 327 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0948-1907
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