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Atomic Layer Deposition of Zirconium Titanium Oxide from Titanium Isopropoxide and Zirconium Chloride

✍ Scribed by Rahtu, Antti; Ritala, Mikko; Leskelä, Markku

Book ID
127113363
Publisher
American Chemical Society
Year
2001
Tongue
English
Weight
76 KB
Volume
13
Category
Article
ISSN
0897-4756

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