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Reaction Mechanism Studies on Titanium Isopropoxide–Water Atomic Layer Deposition Process

✍ Scribed by A. Rahtu; M. Ritala

Publisher: John Wiley and Sons
Year: 2002
Tongue: English
Weight: 429 KB
Volume: 8
Category: Article
ISSN: 0948-1907
DOI: 10.1002/1521-3862(20020116)8:1<21::aid-cvde21>3.0.co;2-0

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