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Initial growth mechanism of atomic layer deposition of ZnO on the hydroxylated Si(1 0 0)-2×1: A density functional theory study

✍ Scribed by Jie Ren

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 329 KB
Volume: 255
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2008.12.077

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