Precursor-dependent structural and electrical characteristics of atomic layer deposited films: Case study on titanium oxide

✍ Scribed by Indrek Jõgi; Kaupo Kukli; Jaan Aarik; Aleks Aidla; Jun Lu

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 558 KB
• Volume: 9
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2006.10.027