๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Demolding temperature in thermal nanoimprint lithography

โœ Scribed by Sunggook Park; Zhichao Song; Lance Brumfield; Alborz Amirsadeghi; Jaejong Lee


Book ID
106021652
Publisher
Springer
Year
2009
Tongue
English
Weight
528 KB
Volume
97
Category
Article
ISSN
1432-0630

No coin nor oath required. For personal study only.


๐Ÿ“œ SIMILAR VOLUMES


Measurement of demolding forces in full
โœ Vera Trabadelo; Helmut Schift; Santos Merino; Sandro Bellini; Jens Gobrecht ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 362 KB

The Jenoptik HEX03 embossing machine has been used in a slightly modified setup to measure the demolding forces online. We optimized the demolding setup to be able to compare ideal demolding processes with a range of process parameters, i.e. pattern design, structure depth and demolding temperature.

Defect analysis in thermal nanoimprint l
โœ Hirai, Yoshihiko; Yoshida, Satoshi; Takagi, Nobuyuki ๐Ÿ“‚ Article ๐Ÿ“… 2003 ๐Ÿ› AVS (American Vacuum Society) ๐ŸŒ English โš– 787 KB