Measurement of demolding forces in full wafer thermal nanoimprint

✍ Scribed by Vera Trabadelo; Helmut Schift; Santos Merino; Sandro Bellini; Jens Gobrecht

• Book ID: 104051930
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 362 KB
• Volume: 85
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2008.01.086

✦ Synopsis

The Jenoptik HEX03 embossing machine has been used in a slightly modified setup to measure the demolding forces online. We optimized the demolding setup to be able to compare ideal demolding processes with a range of process parameters, i.e. pattern design, structure depth and demolding temperature. The demolding force can be deduced from discontinuities of the force recording; these discontinuities, seen as characteristic ''kinks" in the force curve, stem from a sudden release of the stamp from the polymer and the subsequent relaxation of the press column. In this research, we demonstrate that these forces are actual demolding forces.