✦ LIBER ✦
Technique for transfer of high-density, high-aspect-ratio nanoscale patterns in UV nanoimprint lithography and measurement of the release force
✍ Scribed by Jun Taniguchi; Yasuhiro Kamiya; Takeshi Ohsaki; Nobuji Sakai
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 801 KB
- Volume
- 87
- Category
- Article
- ISSN
- 0167-9317
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