𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Thermal nanoimprint lithography using fluoropolymer mold

✍ Scribed by Con, Celal; Zhang, Jian; Jahed, Zeinab; Tsui, Ting Y.; Yavuz, Mustafa; Cui, Bo


Book ID
122600497
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
429 KB
Volume
98
Category
Article
ISSN
0167-9317

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Mold deformation in nanoimprint lithogra
✍ Lazzarino, F.; Gourgon, C.; Schiavone, P.; Perret, C. πŸ“‚ Article πŸ“… 2004 πŸ› AVS (American Vacuum Society) 🌐 English βš– 915 KB
Mold deformation in soft UV-nanoimprint
✍ HongBo Lan; YuCheng Ding; HongZhong Liu; YeRong Que; WeiWei Tao; HanSong Li; Bin πŸ“‚ Article πŸ“… 2008 πŸ› SP Science China Press 🌐 English βš– 850 KB
UV nanoimprint lithography with rigid po
✍ Sandra Gilles; Matthias Meier; Michael PrΓΆmpers; Andre van der Hart; Carsten KΓΌg πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 447 KB