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Fabrication of low-cost mold and nanoimprint lithography using polystyrene nanosphere

✍ Scribed by G.H. Jeong; J.K. Park; K.K. Lee; J.H. Jang; C.H. Lee; H.B. Kang; C.W. Yang; S.J. Suh

Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 754 KB
Volume: 87
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2009.05.022

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