Fabrication of highly ordered metallic arrays and silicon pillars with controllable size using nanosphere lithography

✍ Scribed by Wei Li; Weiming Zhao; Ping Sun

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 446 KB
• Volume: 41
• Category: Article
• ISSN: 1386-9477
• DOI: 10.1016/j.physe.2009.05.009