Fabrication of PECVD-grown fluorinated hydrocarbon nanoparticles and circular nanoring arrays using nanosphere lithography
✍ Scribed by D.K. Sarkar; M. Farzaneh
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 343 KB
- Volume
- 254
- Category
- Article
- ISSN
- 0169-4332
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✦ Synopsis
Nanosphere lithography (NSL) masks were created by spin-coating of polystyrene particles onto silicon surfaces. Fluorinated hydrocarbon films were coated on the nanosphere lithography masks using plasma-enhanced chemical vapor deposition (PECVD) to obtain ordered arrays of fluorinated hydrocarbon. Atomic force microscope images show hexagonally ordered nanodots of dimension 225 AE 11 nm with a height of 23 AE 4 nm. Every hexagon encloses a circular ring of diameter 540 AE 24 nm having a height and width of 13.5 AE 0.6 nm and 203 AE 16 nm, respectively. FTIR analysis shows two distinct zones of atomic bonding of CH x and CF x in the plasma coated ordered fluorinated hydrocarbon films.