✦ LIBER ✦
Improved mold fabrication for the definition of high quality nanopatterns by Soft UV-Nanoimprint lithography using diluted PDMS material
✍ Scribed by Namil Koo; Markus Bender; Ulrich Plachetka; Andreas Fuchs; Thorsten Wahlbrink; Jens Bolten; Heinrich Kurz
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 830 KB
- Volume
- 84
- Category
- Article
- ISSN
- 0167-9317
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