Fabrication of subwavelength aluminum wire grating using nanoimprint lithography and reactive ion etching

✍ Scribed by Seh-Won Ahn; Ki-Dong Lee; Jin-Sung Kim; Sang Hoon Kim; Sarng H. Lee; Joo-Do Park; Phil-Won Yoon

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 237 KB
• Volume: 78-79
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2004.12.040