Replication of mold for UV-nanoimprint lithography using AAO membrane

✍ Scribed by Weimin Zhou; Jing Zhang; Xiaoli Li; Yanbo Liu; Guoquan Min; Zhitang Song; Jianping Zhang

• Book ID: 108063976
• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 350 KB
• Volume: 255
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2009.05.006