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Mold deformation in soft UV-nanoimprint lithography

✍ Scribed by HongBo Lan; YuCheng Ding; HongZhong Liu; YeRong Que; WeiWei Tao; HanSong Li; BingHeng Lu


Book ID
107356112
Publisher
SP Science China Press
Year
2008
Tongue
English
Weight
850 KB
Volume
52
Category
Article
ISSN
1006-9321

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