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Fabrication of metallic nanocavities by soft UV nanoimprint lithography

✍ Scribed by J. Shi; J. Chen; D. Decanini; Y. Chen; A.-M. Haghiri-Gosnet

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 395 KB
Volume: 86
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2008.11.052

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