✦ LIBER ✦
Nanoimprint- and UV-lithography: Mix&Match process for fabrication of interdigitated nanobiosensors
✍ Scribed by L. Montelius; B. Heidari; M. Graczyk; I. Maximov; E-L. Sarwe; T.G.I. Ling
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 894 KB
- Volume
- 53
- Category
- Article
- ISSN
- 0167-9317
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✦ Synopsis
A complete nanobiosensor structure consisting of a 200 ~tm × 200 ~tm area containing 100 nm sized interdigitated nanoelectrodes with varied interelectrode distances has been fabricated using _nanoimprint lithography (NIL) in combination with UV-lithography. The complete structure has been characterized with admittance spectroscopy. In the paper are discussed the needs and key issues for nanosensors and the capabihty offered by using NIL for fabrication of such sensors.