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Arrays of metallic nanocones fabricated by UV-nanoimprint lithography

โœ Scribed by Juha M. Kontio; Janne Simonen; Juha Tommila; Markus Pessa

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
493 KB
Volume
87
Category
Article
ISSN
0167-9317

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A complete nanobiosensor structure consisting of a 200 ~tm ร— 200 ~tm area containing 100 nm sized interdigitated nanoelectrodes with varied interelectrode distances has been fabricated using \_nanoimprint lithography (NIL) in combination with UV-lithography. The complete structure has been character