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Fabrication of flexible mold for hybrid nanoimprint-soft lithography

✍ Scribed by Jian Zhang; Bo Cui; Haixiong Ge

Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 742 KB
Volume: 88
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2010.12.107

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