Surface adhesion and demolding force dependence on resist composition in ultraviolet nanoimprint lithography

✍ Scribed by Alborz Amirsadeghi; Jae Jong Lee; Sunggook Park

• Book ID: 116244712
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 691 KB
• Volume: 258
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2011.09.090