✦ LIBER ✦
Molecular simulation study on adhesions and deformations for Polymethyl Methacrylate (PMMA) resist in nanoimprint lithography
✍ Scribed by Sungjin Kwon; Youngmin Lee; Jaeshin Park; Seyoung Im
- Book ID
- 107625250
- Publisher
- Springer-Verlag
- Year
- 2011
- Tongue
- English
- Weight
- 736 KB
- Volume
- 25
- Category
- Article
- ISSN
- 1738-494X
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