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Damage induced in Si by ion milling or reactive ion etching

✍ Scribed by Pang, S. W.; Rathman, D. D.; Silversmith, D. J.; Mountain, R. W.; DeGraff, P. D.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Surface Damage on GaAs Induced by Reacti

✍ Pang, S. W. 📂 Article 📅 1986 🏛 The Electrochemical Society 🌐 English ⚖ 489 KB

Admittance characteristics of au/p-si sc

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Evaluation of induced damage by CH4/H2 r

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✍ Arora, B. M. 📂 Article 📅 1987 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 752 KB

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Comparison of damage in the dry etching

✍ Cheung, R. 📂 Article 📅 1989 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 771 KB