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Surface Damage on GaAs Induced by Reactive Ion Etching and Sputter Etching

✍ Scribed by Pang, S. W.

Book ID: 127265118
Publisher: The Electrochemical Society
Year: 1986
Tongue: English
Weight: 489 KB
Volume: 133
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.2108677

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