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Raman scattering investigations of the damage caused by reactive-ion-etching of GaAs

✍ Scribed by M. Watt; C.M. Sotomayor-Torres; R. Cheung; C.D.W. Wilkinson; H.E.G. Arnost; S.P. Beaumont


Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
138 KB
Volume
4
Category
Article
ISSN
0749-6036

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