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The study of GaAs reactive ion etching in Cl2/Ar

✍ Scribed by AE Dulkin; VZ Pyataev; NO Sokolova; SA Moshkalyov; AS Smirnov; KS Frolov


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
429 KB
Volume
44
Category
Article
ISSN
0042-207X

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