✦ LIBER ✦
10-nm-wire fabrication in GaAs/AlGaAs MQWs by Cl2 reactive ion beam etching using SiO2 sidewall masks
✍ Scribed by H. Arimoto; H. Kitada; Y. Sugiyama; A. Tackeuchi; A. Endo; S. Muto
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 356 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0167-9317
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