✦ LIBER ✦
Reactive ion etching of InAlAs with Ar/Cl2 mixtures for ridge waveguide lasers
✍ Scribed by R. Germann; S. Hausser; J.-P. Reithmaier
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 318 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0167-9317
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